New Method of Vapour Discrimination Using the Thickness Shear Mode (TSM) Resonator

Characterization of Epoxy Resin (SU-8) Film Using Thickness-Shear Mode (TSM) Resonator under Various Conditions

Equivalent-circuit model for the thickness-shear mode resonator with a viscoelastic film near film resonance.

We derive a lumped-element, equivalent-circuit model for the thickness-shear mode (TSM) resonator with a viscoelastic film. This modified Butterworth-Van Dyke model includes in the motional branch a series LCR resonator, representing the quartz resonance, and a parallel LCR resonator, representing the film resonance. This model is valid in the vicinity of film resonance, which occurs when the a...

Determination of the viscoelastic shear modulus of poly(isobutylene)/solvent systems using thickness-shear mode quartz resonators

Determination of the storage modulus, G', loss modulus, G", and, consequently, the shear moduli, G (G = G' + jG" ), of polymer and polymer/solvent systems was conducted in this study using a thickness-shear mode (TSM) quartz resonator. The polymer poly(isobutylene) was spin-coated as a film of a few microns thickness on the surface of the TSM device and, upon inducing oscillation of the device ...

Study of the Relation between the Resonance Behavior of Thickness Shear Mode (TSM) Sensors and the Mechanical Characteristics of Biofilms

This work analyzes some key aspects of the behavior of sensors based on piezoelectric Thickness Shear Mode (TSM) resonators to study and monitor microbial biofilms. The operation of these sensors is based on the analysis of their resonance properties (both resonance frequency and dissipation factor) that vary in contact with the analyzed sample. This work shows that different variations during ...

Electromechanical Coupling Factor of Thickness - Shear Mode of the Piezoelectric Thin Films Deposited on Substrates

An experiment method for characterizing piezoelectric film, which is deposited on a substrate plate to form a thickness-shear wave High-overmode Bulk Acoustic Resonator (HBAR), will be presented in this paper. Based on the parallel and series resonant frequency spectra of the HBAR, the electromechanical coupling factor of the piezoelectric film operating in thickness-shear mode can be evaluated...